Skip to main content

 Flow Sensors, Meters & Mass Flow Controllers

MASS FLOW SENSORS

For clean gas flow applications

FS6122 MASS FLOW SENSORS

For CPAP and other applications

This product integrated mass flow, pressure, temperature and humidity sensors in a single package for CPAP and other applications.

Datasheet

FS1015 MASS FLOW SENSORS

For medical and other applications

This sensor is designed for medical applications such as ventilators. It can also be used for general purpose flow measurement with threaded adapters.

Datasheet

FS4001 MASS FLOW SENSORS

For instrumentation and other applications

The sensors are designed for instrumentation such as GC and others. It can also be used for the general purpose flow measurement under 1000 sccm.

Datasheet

FS4000 MASS FLOW SENSORS

For medical and other applications

The products can be used for medical applications and many others. Examples are anesthesia, endoscope, gas mixture, wielding gas process. The connectors can be exchangeable.

Datasheet

FS5001 MASS FLOW SENSORS

For instrumentation and manifold

The sensors are designed for instrumentation and/or manifold assembly. It has two version – low flow up to 1000sccm high flow to 4SLPM

Datasheet
FS8000 MASS FLOW SENSORS

For equipment and process control

The sensors provide the fastest response to 1 msec, and it is best for automation, robot control and or other instrumentation applications.
Datasheet

FS7002 MASS FLOW SENSORS

For open space flow speed metering

These sensors are used for free space gas flow speed measurement, and also applicable for clog sensing for filters.

Datasheet

AM1000 MASS FLOW METERS
For HVAC and other applications

These products are designed for environmental probe with integration of temperature and humidity sensors. The air flow is calibrated in a wind-tunnel.

 

Datasheet

FS6100 MASS FLOW SENSORS
For industrial processing applications

The sensors are designed for industrial process flow measurement applications, flow up to 10000SLPM, and pressure up to 1.0MPa.

Datasheet

FS5200 MASS FLOW SENSORS

For equipment and process control

The sensors provide the process monitor and metrological data. It opts thermal value of fuel gases.
Datasheet